5/1/2010	2:05:51 PM	Bypass valve closed
5/1/2010	2:05:52 PM	Main Vac valve closed
5/1/2010	2:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2010	2:06:08 PM	Recipe started at 2:06 PM
5/1/2010	2:06:08 PM	H2 valve closed
5/1/2010	2:06:08 PM	BCl3 valve closed
5/1/2010	2:06:08 PM	PH3 valve closed
5/1/2010	2:06:08 PM	SiCl4 pre valve closed
5/1/2010	2:06:08 PM	SiCl4 post valve closed
5/1/2010	2:06:08 PM	Main Vac valve closed
5/1/2010	2:06:08 PM	Bypass valve closed
5/1/2010	2:06:08 PM	Bubbler valve closed
5/1/2010	2:06:08 PM	Helium valve opened
5/1/2010	2:06:08 PM	Helium MFC set to  500.000000
5/1/2010	2:06:08 PM	H2 MFC set to  0.000000
5/1/2010	2:06:08 PM	BCl3 MFC set to  0.000000
5/1/2010	2:06:08 PM	SiCl4 MFC set to  0.000000
5/1/2010	2:06:08 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	2:06:08 PM	Tube furnace set to 0
5/1/2010	2:07:15 PM	Helium valve closed
5/1/2010	2:07:15 PM	H2 valve closed
5/1/2010	2:07:15 PM	BCl3 valve closed
5/1/2010	2:07:15 PM	PH3 valve closed
5/1/2010	2:07:15 PM	SiCl4 pre valve closed
5/1/2010	2:07:15 PM	SiCl4 post valve closed
5/1/2010	2:07:15 PM	Main Vac valve closed
5/1/2010	2:07:15 PM	Bypass valve closed
5/1/2010	2:07:15 PM	Bubbler valve closed
5/1/2010	2:07:15 PM	Helium MFC set to  0.000000
5/1/2010	2:07:15 PM	H2 MFC set to  0.000000
5/1/2010	2:07:15 PM	BCl3 MFC set to  0.000000
5/1/2010	2:07:15 PM	SiCl4 MFC set to  0.000000
5/1/2010	2:07:15 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	2:07:15 PM	Tube furnace set to 0
5/1/2010	2:07:16 PM	Run finished at 2:07 PM
5/1/2010	2:07:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2010	2:08:02 PM	Tube furnace set to 1000
5/1/2010	2:23:49 PM	Tube furnace set to 0
5/1/2010	2:44:49 PM	Bypass valve opened
5/1/2010	2:44:56 PM	Bypass valve closed
5/1/2010	2:45:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2010	2:45:55 PM	Recipe started at 2:45 PM
5/1/2010	2:45:55 PM	Helium valve closed
5/1/2010	2:45:55 PM	H2 valve closed
5/1/2010	2:45:55 PM	BCl3 valve closed
5/1/2010	2:45:55 PM	PH3 valve closed
5/1/2010	2:45:55 PM	SiCl4 pre valve closed
5/1/2010	2:45:55 PM	SiCl4 post valve closed
5/1/2010	2:45:55 PM	Main Vac valve closed
5/1/2010	2:45:55 PM	Bubbler valve closed
5/1/2010	2:45:55 PM	Bypass valve opened
5/1/2010	2:45:55 PM	Helium MFC set to  0.000000
5/1/2010	2:45:55 PM	H2 MFC set to  0.000000
5/1/2010	2:45:55 PM	BCl3 MFC set to  0.000000
5/1/2010	2:45:55 PM	SiCl4 MFC set to  0.000000
5/1/2010	2:45:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	2:45:55 PM	Tube furnace set to 0
5/1/2010	2:46:39 PM	Helium valve closed
5/1/2010	2:46:39 PM	H2 valve closed
5/1/2010	2:46:39 PM	BCl3 valve closed
5/1/2010	2:46:39 PM	PH3 valve closed
5/1/2010	2:46:39 PM	SiCl4 pre valve closed
5/1/2010	2:46:39 PM	SiCl4 post valve closed
5/1/2010	2:46:39 PM	Bubbler valve closed
5/1/2010	2:46:39 PM	Main Vac valve opened
5/1/2010	2:46:39 PM	Bypass valve opened
5/1/2010	2:46:39 PM	Helium MFC set to  0.000000
5/1/2010	2:46:39 PM	H2 MFC set to  0.000000
5/1/2010	2:46:39 PM	BCl3 MFC set to  0.000000
5/1/2010	2:46:39 PM	SiCl4 MFC set to  0.000000
5/1/2010	2:46:39 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	2:46:39 PM	Tube furnace set to 0
5/1/2010	2:46:40 PM	Run finished at 2:46 PM
5/1/2010	2:46:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2010	2:48:12 PM	Bypass valve closed
5/1/2010	2:48:13 PM	Main Vac valve closed
5/1/2010	2:48:21 PM	Main Vac valve opened
5/1/2010	2:48:22 PM	Bypass valve opened
5/1/2010	2:48:29 PM	H2 valve opened
5/1/2010	2:48:36 PM	H2 valve closed
5/1/2010	2:48:59 PM	H2 valve opened
5/1/2010	2:49:03 PM	H2 MFC set to  500.000000
5/1/2010	2:53:15 PM	H2 valve closed
5/1/2010	2:53:38 PM	H2 valve opened
5/1/2010	2:56:21 PM	H2 valve closed
5/1/2010	2:56:22 PM	H2 valve opened
5/1/2010	2:56:24 PM	H2 valve closed
5/1/2010	2:59:04 PM	Bypass valve closed
5/1/2010	2:59:05 PM	Main Vac valve closed
5/1/2010	2:59:24 PM	Main Vac valve opened
5/1/2010	2:59:26 PM	Bypass valve opened
5/1/2010	3:02:01 PM	Recipe started at 3:02 PM
5/1/2010	3:02:01 PM	Helium valve closed
5/1/2010	3:02:01 PM	BCl3 valve closed
5/1/2010	3:02:01 PM	PH3 valve closed
5/1/2010	3:02:01 PM	SiCl4 pre valve closed
5/1/2010	3:02:01 PM	SiCl4 post valve closed
5/1/2010	3:02:01 PM	Main Vac valve closed
5/1/2010	3:02:01 PM	Bypass valve closed
5/1/2010	3:02:01 PM	Bubbler valve closed
5/1/2010	3:02:01 PM	H2 valve opened
5/1/2010	3:02:01 PM	Helium MFC set to  0.000000
5/1/2010	3:02:01 PM	H2 MFC set to  500.000000
5/1/2010	3:02:01 PM	BCl3 MFC set to  0.000000
5/1/2010	3:02:01 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:02:01 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	3:02:01 PM	Tube furnace set to 0
5/1/2010	3:03:23 PM	Helium valve closed
5/1/2010	3:03:23 PM	BCl3 valve closed
5/1/2010	3:03:23 PM	PH3 valve closed
5/1/2010	3:03:23 PM	SiCl4 pre valve closed
5/1/2010	3:03:23 PM	SiCl4 post valve closed
5/1/2010	3:03:23 PM	Main Vac valve closed
5/1/2010	3:03:23 PM	Bypass valve closed
5/1/2010	3:03:23 PM	H2 valve opened
5/1/2010	3:03:23 PM	Bubbler valve opened
5/1/2010	3:03:23 PM	Helium MFC set to  0.000000
5/1/2010	3:03:23 PM	H2 MFC set to  500.000000
5/1/2010	3:03:23 PM	BCl3 MFC set to  0.000000
5/1/2010	3:03:23 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:03:23 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	3:03:23 PM	Tube furnace set to 1000
5/1/2010	3:23:23 PM	Helium valve closed
5/1/2010	3:23:23 PM	BCl3 valve closed
5/1/2010	3:23:23 PM	PH3 valve closed
5/1/2010	3:23:23 PM	Main Vac valve closed
5/1/2010	3:23:23 PM	Bypass valve closed
5/1/2010	3:23:23 PM	H2 valve opened
5/1/2010	3:23:23 PM	SiCl4 pre valve opened
5/1/2010	3:23:23 PM	SiCl4 post valve opened
5/1/2010	3:23:23 PM	Bubbler valve opened
5/1/2010	3:23:23 PM	Helium MFC set to  0.000000
5/1/2010	3:23:23 PM	H2 MFC set to  500.000000
5/1/2010	3:23:23 PM	BCl3 MFC set to  0.000000
5/1/2010	3:23:23 PM	SiCl4 MFC set to  325.000000
5/1/2010	3:23:23 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	3:23:23 PM	Tube furnace set to 1000
5/1/2010	3:43:23 PM	H2 valve closed
5/1/2010	3:43:23 PM	BCl3 valve closed
5/1/2010	3:43:23 PM	PH3 valve closed
5/1/2010	3:43:23 PM	SiCl4 pre valve closed
5/1/2010	3:43:23 PM	SiCl4 post valve closed
5/1/2010	3:43:23 PM	Main Vac valve closed
5/1/2010	3:43:23 PM	Bypass valve closed
5/1/2010	3:43:23 PM	Helium valve opened
5/1/2010	3:43:23 PM	Bubbler valve opened
5/1/2010	3:43:23 PM	Helium MFC set to  500.000000
5/1/2010	3:43:23 PM	H2 MFC set to  0.000000
5/1/2010	3:43:23 PM	BCl3 MFC set to  0.000000
5/1/2010	3:43:23 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:43:23 PM	Bypass solenoid MFC set to  0.000000
5/1/2010	3:43:24 PM	Tube furnace set to 0
5/1/2010	3:46:10 PM	Run aborted at 3:46 PM
5/1/2010	3:46:10 PM	Helium valve closed
5/1/2010	3:46:10 PM	H2 valve closed
5/1/2010	3:46:10 PM	BCl3 valve closed
5/1/2010	3:46:10 PM	PH3 valve closed
5/1/2010	3:46:10 PM	SiCl4 pre valve closed
5/1/2010	3:46:10 PM	SiCl4 post valve closed
5/1/2010	3:46:10 PM	Bypass valve closed
5/1/2010	3:46:10 PM	Main Vac valve closed
5/1/2010	3:46:10 PM	Bubbler valve closed
5/1/2010	3:46:10 PM	Helium MFC set to  0.000000
5/1/2010	3:46:10 PM	H2 MFC set to  0.000000
5/1/2010	3:46:10 PM	BCl3 MFC set to  0.000000
5/1/2010	3:46:10 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:46:10 PM	Tube furnace set to 0
5/1/2010	3:46:29 PM	Program started after a nonstandard shutdown
5/1/2010	3:46:29 PM	Helium valve closed
5/1/2010	3:46:29 PM	H2 valve closed
5/1/2010	3:46:29 PM	BCl3 valve closed
5/1/2010	3:46:29 PM	PH3 valve closed
5/1/2010	3:46:29 PM	SiCl4 pre valve closed
5/1/2010	3:46:29 PM	SiCl4 post valve closed
5/1/2010	3:46:29 PM	Main Vac valve closed
5/1/2010	3:46:29 PM	Bypass valve closed
5/1/2010	3:46:29 PM	Bubbler valve closed
5/1/2010	3:46:29 PM	Helium MFC set to  0.000000
5/1/2010	3:46:29 PM	H2 MFC set to  0.000000
5/1/2010	3:46:29 PM	BCl3 MFC set to  0.000000
5/1/2010	3:46:29 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:46:29 PM	Bypass solenoid MFC set to  760.000000
5/1/2010	3:46:29 PM	Tube furnace set to 0
5/1/2010	3:47:36 PM	Program started after a nonstandard shutdown
5/1/2010	3:47:36 PM	Helium valve closed
5/1/2010	3:47:36 PM	H2 valve closed
5/1/2010	3:47:36 PM	BCl3 valve closed
5/1/2010	3:47:36 PM	PH3 valve closed
5/1/2010	3:47:36 PM	SiCl4 pre valve closed
5/1/2010	3:47:36 PM	SiCl4 post valve closed
5/1/2010	3:47:36 PM	Main Vac valve closed
5/1/2010	3:47:36 PM	Bypass valve closed
5/1/2010	3:47:36 PM	Bubbler valve closed
5/1/2010	3:47:36 PM	Helium MFC set to  0.000000
5/1/2010	3:47:36 PM	H2 MFC set to  0.000000
5/1/2010	3:47:36 PM	BCl3 MFC set to  0.000000
5/1/2010	3:47:36 PM	SiCl4 MFC set to  0.000000
5/1/2010	3:47:36 PM	Bypass solenoid MFC set to  760.000000
5/1/2010	3:47:36 PM	Tube furnace set to 0
5/1/2010	3:47:40 PM	Bypass valve opened
5/1/2010	3:47:41 PM	Bypass valve closed
5/1/2010	3:47:47 PM	Bypass valve opened
5/1/2010	3:47:49 PM	Bypass valve closed
5/1/2010	3:47:53 PM	Bypass valve opened
5/1/2010	3:48:12 PM	Main Vac valve opened
5/1/2010	3:49:08 PM	Bypass valve closed
5/1/2010	3:49:08 PM	Main Vac valve closed
5/1/2010	3:49:13 PM	Bypass valve opened
5/1/2010	3:49:13 PM	Main Vac valve opened
